Short Title:Semiconductor Fabrication
Full Title:Semiconductor Fabrication
Language of Instruction:English
Module Code:SEMT H3001
 
Credits: 5
Field of Study:Electronics and automation
Module Delivered in 3 programme(s)
Reviewed By:JAMES WRIGHT
Module Author:JAMES WRIGHT
Module Description:The aim of semiconductor fabrication is to introduce the student to the clean room laboratory where they will learn how to work safely and manufacture simple semiconductor devices. Furthermore the student will know and understand the challenges to be overcome during the fabrication process and will understand how to characterise the performance of a device fabricated in the laboratory.
Learning Outcomes
On successful completion of this module the learner will be able to:
LO1 Describe the standard silicon device fabrication processes and equipment.
LO2 Explain the physics of silicon device operation and fabrication.
LO3 Define a problem, gather & analyse experimental data, evaluate a solution as part of a project, write laboratory reports while considering all ethical implications
LO4 Fabricate a basic semiconductor device using the process facilities of the Semiconductor Laboratory
LO5 Test and analyse the performance of the fabricated device.
LO6 Communicate effectively as part of a team, as well as formally presenting their findings verbally and in written documents.
 

Module Content & Assessment

Course Work
Assessment Type Assessment Description Outcome addressed % of total Assessment Date
Continuous Assessment Introduction to the clean room and safetly. 1,4 2.50 Week 2
Assignment Assignment on Vacuum Basics and Metallisation 1,2,4 2.50 Week 4
Assignment Assignment based on the modelling/ simulation of individual process steps. 1,2,4 2.50 Week 6
Assignment Assignment based on Photolithography 1,2,4 2.50 Week 8
Continuous Assessment Group project based on the design of the final testing experiment including analysis of results. 3,5,6 5.00 Week 10
Continuous Assessment Individual report on the fabrication and analysis of a MOSCAP semiconductor device. 1,2,3,4,5 30.00 Week 12
Project Integrated Project contribution to the CA score 6 5.00 Sem 1 End
End of Module Formal Examination
Assessment Type Assessment Description Outcome addressed % of total Assessment Date
Formal Exam End-of-Semester Final Examination 1,2,3,4,5 50.00 End-of-Semester

TU Dublin – Tallaght Campus reserves the right to alter the nature and timings of assessment

 

Module Workload

Workload: Full Time
Workload Type Workload Description Hours Frequency Average Weekly Learner Workload
Lecture class time 2.00 Every Week 2.00
Lab Practical work 2.00 Every Week 2.00
Independent Learning Outside of class 4.00 Every Week 4.00
Total Weekly Learner Workload 8.00
Total Weekly Contact Hours 4.00
Workload: Part Time
Workload Type Workload Description Hours Frequency Average Weekly Learner Workload
Lecture Class time 2.00 Every Week 2.00
Lab Practical work 2.00 Every Week 2.00
Independent Learning Outside of class 4.00 Every Week 4.00
Total Weekly Learner Workload 8.00
Total Weekly Contact Hours 4.00
 

Module Resources

Recommended Book Resources
  • Peter Van Zant 2014, Microchip Fabrication, 6th Ed. Ed., McGraw-Hill Education [ISBN: 9780071821018]
  • Gary S. May, Simon M. Sze 2007, Fundamentals of semiconductor fabrication, Wiley Hoboken, NJ [ISBN: 978-0-471-23279-7]
  • Yale E, Brundle R & Evans C 2010, Characterisation in Silicon Processing, 1st ed Ed., Momentum Press [ISBN: 978-1606501092]
  • May G. S. & Spanos C.J 2006, Fundamental of Semiconductor Manufacturing and Process Control, 1st ed Ed., Wiley Blackwell [ISBN: 987-0471784067]
This module does not have any article/paper resources
Other Resources
  • Moodle course notes: Complete set of course notes available on Moodle platform
 

Module Delivered in

Programme Code Programme Semester Delivery
TA_EAELE_B Bachelor Degree in Engineering (Honours) in Electronic Engineering 5 Mandatory
TA_EAELE_D Bachelor of Engineering in Electronic Engineering 5 Mandatory
TA_EELEC_D Bachelor of Engineering In Electronic Engineering - Add On Year 1 Mandatory